光学

衍射光栅的电磁场理论

1978年3月至1981年5月在哈尔滨工业大学学习。

1981年8月通过中国—美国物理学联合考试招生(CUSPEA)赴美国留学,1983年5月于亚利桑那大学获物理学硕士学位,同年转入该大学光学中心,1988年5月获光学博士学位。1988年5月至2000年1月就职于光学中心。

2000年1月作为国家长江学者奖励计划第二批特聘教授回国工作,任职于清华大学精密仪器系。2001年获国家杰出青年科学基金资助。

清华大学精密仪器系3205房间 100084

联系电话:010-62773740

lifengli@mail.tsinghua.edu.cn

点此浏览光栅与测量实验室网页

2005-2014年主要学术论文:

  1. Xihong Xu and Lifeng Li, Simple parameterized coordinate transformation method for deep- and smooth-profile gratings, Opt. Lett., 39, 6644-6647 (2014).

  2. Lifeng Li, Field singularities at lossless metal dielectric arbitrary-angle edges and their ramifications to the numerical modeling of gratings, J. Opt. Soc. Am. A 29, 593-604 (2012).

  3. Lifeng Li and Gerard Granet, Field singularities at lossless metal dielectric right-angle edges and their ramifications to the numerical modeling of gratings, J. Opt. Soc. Am. A 28, 738-746 (2011).

  4. L. Li, Comment on "Optimized matrix inversion technique for the T-matrix method", Opt. Lett., 33, 1366-1366 (2008).

  5. S. Wei and L. Li, Measurement of photoresist grating profiles based on multiwavelength scatterometry and artificial neural network, Appl. Opt., 47, 2524-2532 (2008).

  6. H. Lin, L. Zhang, L. Li, C. Jin, H. Zhou, and T. Huo, High-efficiency multilayer-coated ion-beam-etched blazed grating in the extreme-ultraviolet wavelength region, Opt. Lett., 33, 485-487 (2008).

  7. X. Meng and L. Li, In situ endpoint detection of reactive ion-beam etching of dielectric gratings with an etch-stop layer using downstream mass spectrometry, Appl. Surf. Sci., 254, 5421-5425 (2008).

  8. L. Li, Using symmetries of grating groove profiles to reduce computation cost of the C method, J. Opt. Soc. Am. A 24, 1085-1096 (2007)

  9. L. Zeng and L. Li, Optical mosaic gratings made by consecutive, phase-interlocked, holographic exposures using diffraction from latent fringes, Opt. Lett., 32, 1081-1083 (2007).

  10. Y. Hu, L. Zeng, and L. Li, Method to mosaic gratings that relies on analysis of far-field intensity patterns in two wavelengths, Opt. Commun., 269, 285-290 (2007).

  11. N. Bonod, E. Popov, L. Li, and B. Chernov, Unidirectional excitation of surface plasmons by slanted gratings, Opt. Express, 15, 11427-11432 (2007).

  12. B. Bai and L. Li, Group-theoretic approach to enhancing the Fourier modal method for crossed gratings with hexagonal symmetry, J. Mod. Opt., 53, 1459-1483 (2006).

  13. D. V. Labeke, D. Gerard, B. Guizal, F. I. Baida, and L. Li, An angle-independent frequency selective surface in the optical range, Opt. Express. 14, 11945-11951 (2006).

  14. G. Granet and L. Li, Convincingly converged results for highly conducting periodically perforated thin films with square symmetry, J. Opt. A: Pure Appl. Opt. 8, 546-549 (2006).

  15. B. Bai and L. Li, Group-theoretic approach to enhancing the Fourier modal method for crossed gratings with square symmetry, J. Opt. Soc. Am. A 23, 572-580 (2006).

  16. B. Bai and L. Li, Group-theoretic approach to enhancing the Fourier modal method for crossed gratings with equilateral triangular symmetry, Opt. Commun. 262, 140-151 (2006).

  17. C. M. B. Cordeiro, E. J. de Carvalho, L. Cescato, A. A. Freschi, and L. Li, Phase constraint for the waves diffracted by lossless symmetrical gratings at Littrow mount, J. Opt. Soc. Am. A 23, 166-171 (2006).

  18. L. Zeng and L. Li, Method of making mosaic gratings by using a two-color heterodyne interferometer containing a reference grating, Opt. Lett., 31, 152-155 (2006).

  19. B. Bai, L. Li, and L. Zeng, Experimental verification of enhanced transmission through two-dimensionally corrugated metallic films without holes, Opt. Lett. 18, 2360-2362 (2005).

  20. L. Li and L. Zeng, Measurement of duty cycles of photoresist grating masks made on top of multilayer dielectric stacks, Appl. Opt., 44, 4494-4500 (2005).

  21. B. Bai and L. Li, Group-theoretic approach to the enhancement of the Fourier modal method for crossed gratings: C2 symmetry case, J. Opt. Soc. Am. A 22, 654-661 (2005).

  22. B. Bai and L. Li, Group-theoretic approach to enhancing the Fourier modal method for crossed gratings with one or two reflection symmetries, J. Opt. A: Pure Appl. Opt. 7, 271-278 (2005).

  23. B. Bai and L. Li, Group-theoretic approach to enhancing the Fourier modal method for crossed gratings of plane group p3, J. Mod. Opt. 52, 1619-1634 (2005).

  24. B. Bai and L. Li, Group-theoretic approach to enhancing the Fourier modal method for crossed gratings with C4 symmetry, J. Opt. A: Pure Appl. Opt. 7, 783-789 (2005).

  25. H. Lin, L. Li, and L Zeng. In-situ end-point detection during ion-beam etching of multilayer dielectric gratings, Chin. Opt. Lett. 3, 63-65 (2005).

  26. 孟祥峰, 李立峰, 提高离子束刻蚀亚微米光栅侧壁陡直度的方法, 光学学报, 28, 189–193 (2008).

  27. 周倩, 李立峰, 曾理江, 平场全息凹面光栅制作结构与使用结构之间误差补偿作用的数值模拟与实验验证, 光谱学与光谱分析, 28, (2008).

  28. 林华, 李立峰, 曾理江, 利用导波耦合角度实时控制光刻胶光栅掩模的占宽比, 光学学报, 26, 767–772 (2006).

  29. 周倩, 李立峰, 光谱用平场凹面光栅的凸面母光栅的消像差设计思路, 光谱学与光谱分析, 29, 2281-2285 (2009).

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