2005年到2017年,光栅测量 实验室在光栅设计制作应用和仿生测量等方面取得了丰硕的研究成果,共发表期刊学术论文50余篇,获得3项授权专利。

光栅设计制作应用方面论文:

  1. D. Ma, S. Wang, and L. Zeng, Wavefront aberration of plane diffraction gratings fabricated in a Lloyd's mirror interferometer, J. Micro/Nanolith. MEMS MOEMS 16(2), 023503 (2017).

  2. D. Ma and L. Zeng, Reducing the stray light of holographic gratings by shifting the substrate a short distance in the direction parallel or perpendicular to the exposure interference fringes, Chin. Opt. Lett. 15(10), 100501(2017).

  3. D. Ma, Y. Zhao, and L. Zeng, Achieving unlimited recording length in interference lithography via broad-beam scanning exposure with self-referencing alignment, Sci. Rep., 7, 926 (2017).

  4. H. Zhou and L. Zeng, Optical mosaic method for orthogonally crossed gratings based on a dual Lloyd's mirror interferomer, Opt. Commun., 385, 181-187 (2017).

  5. S. Wang and L. Zeng, Controlling the duty cycle of holographic crossed gratings by in situ endpoint detection during development, Appl. Opt., 55, 2657-2663 (2016).

  6. H. Zhou and L. Zeng, Method to fabricate orthogonal crossed gratings based on a dual Lloyd's mirror interferometer, Opt. Commun., 360, 68-72 (2016).

  7. 申碧瑶,曾理江,李立峰, 颜宏, 多层介质膜偏振无关光栅的研制, 强激光与粒子束, 27, 27111013 (2015).

  8. D. Ma and L. Zeng, Fabrication of low-stray-light gratings by broad-beam scanning exposure in the direction perpendicular to the grating grooves, Opt. Lett., 40, 1346-1349 (2015).

  9. S. Wang and L. Zeng, Analysis and minimization of spacing error of holographic gratings recorded with spherical collimation lenses, Opt. Express, 23, 5532-5546 (2015).

  10. X. Xu and L. Li, Simple parameterized coordinate transformation method for deep- and smooth-profile gratings, Opt. Lett., 39, 6644-6647 (2014).

  11. H. Chen, H. Guan, L. Zeng, and Y. Jin, Fabrication of broadband, high-efficiency, metal-multilayer-dielectric gratings, Opt. Commun., 329, 103-108 (2014).

  12. L. Yang, L. Zeng, and L. Li, Scatterometry specialized for a highly asymmetric triangular grating on a transparent substrate, Appl. Opt., 53, 1143-1150 (2014).

  13. C. Feng, L. Zeng, and S. Wang, Heterodyne planar grating encoder with high alignment tolerance, especially insensitivity to grating tilts, 8th International Symposium on Precision Engineering Measurements and Instrumentation, Chengdu, China, 2012.

  14. C. Feng, L. Li, and L. Zeng, Phase invariance in a recently proposed common-path laser interferometer, Chinese Optics Letters, 2012, 10(12): 121201

  15. C. Feng, M. Kajima, S. Gonda, K. Minoshima, H. Fujimoto, and L. Zeng, Accurate measurement of orthogonality of equal-period, two-dimensional gratings by an interferometric method, Metrologia 49, 236-244(2012)

  16. L. Li, Field singularities at lossless metal dielectric arbitrary-angle edges and their ramifications to the numerical modeling of gratings, J. Opt. Soc. Am. A 29, 593-604 (2012).

  17. L. Li and G. Granet, Field singularities at lossless metal dielectric right-angle edges and their ramifications to the numerical modeling of gratings, J. Opt. Soc. Am. A 28, 738-746 (2011).

  18. L. Shi and L. Zeng, Fabrication of large mosaic gratings by locking the exposure fringes to the latent gratings, the 10th International Symposium on Measurement Technology and Intelligent Instruments, paper F4-2, Jun. 29-Jul. 2, 2011, Daejeon, Korea.

  19. L. Shi and L. Zeng, Enlarging grating area by multi-exposures, SPIE Newsroom, 2011, DOI: 10.1117/2.1201103.003467.

  20. L. Shi and L. Zeng, Fabrication of optical mosaic gratings: a self-referencing alignment method, Opt. Express, 19, 8985-8993 (2011).

  21. L. Zeng and L. Shi, Fabrication of large gratings using the optical mosaic technique, Proc. of Annual Meeting of The Optical Society of Japan: Optics & Photonics Japan 2010, paper 8pIS3, Nov. 8-10, 2010, Tokyo, Japan.

  22. L. Shi and L. Zeng, Fabrication of optical mosaic gratings by consecutive holographic exposures employing a latent-fringe based alignment technique, Proc. of SPIE, Vol. 7848, pp. 78480S-1, Oct. 18-20, 2010, Beijing, China.

  23. L. Zeng, L. Shi, and L. Li, Fabrication of large grating by monitoring the latent fringe pattern, Key Eng. Mater., 437, 56-60 (2010).

  24. L. Shi, L. Zeng, and L. Li, Fabrication of optical mosaic gratings with phase and attitude adjustments employing latent fringes and a red-wavelength dual-beam interferometer, Opt. Express, 17, 21530-21543 (2009).

  25. C. Guo and L. Zeng, Measurement of period difference in grating pair based on compensation analysis of phase difference between diffraction beams, Appl. Opt., 48, 1651-1657 (2009).

  26. H. Lin, L.Zhang, C.Jin, et al. Fabrication and efficiency measurement of a multilayer-coated ion-beam-etched laminar grating for the extreme ultraviolet wavelength region, Chinese Optics Letters, 7,180-182 (2009).

  27. B. Bai, X. Meng, J. Laukkanen, T. Sfez, L. Yu, W. Nakagawa, H. P. Herzig, L. Li, and J. Turunen, Asymmetrical excitation of surface plasmon polaritons on blazed gratings at normal incidence, Phys. Rev. B, 80, 035407 (2009).

  28. X. Meng, B. Bai, P. Karvinen, K. Konishi, J. Turunen, Y. Svirko, and M. Kuwata-Gonokami, Experimental realization of all-dielectric planar chiral metamaterials with large optical activity in direct transmission, Thin Solid Films, 516, 8745-8748 (2008).
  29. C. Guo and L. Zeng, Measurement of period difference in grating pair based on analysis of far-field intensity patterns, Opt. Commun., 281, 3611-3616 (2008).

  30. H. Lin and L. Li. Fabrication of extreme-ultraviolet blazed gratings by use of direct argon-oxygen ion-beam etching through a rectangular photoresist mask, Applied Optics, 47, 6212-6218 (2008).

  31. L. Li, Comment on "Optimized matrix inversion technique for the T-matrix method", Opt. Lett., 33, 1366-1366 (2008).

  32. S. Wei and L. Li, Measurement of photoresist grating profiles based on multiwavelength scatterometry and artificial neural network, Appl. Opt., 47, 2524-2532 (2008).

  33. H. Lin, L. Zhang, L. Li, C. Jin, H. Zhou, and T. Huo, High-efficiency multilayer-coated ion-beam-etched blazed grating in the extreme-ultraviolet wavelength region, Opt. Lett., 33, 485-487 (2008).

  34. X. Meng and L. Li, In situ endpoint detection of reactive ion-beam etching of dielectric gratings with an etch-stop layer using downstream mass spectrometry, Appl. Surf. Sci., 254, 5421-5425 (2008).

  35. L. Li, Using symmetries of grating groove profiles to reduce computation cost of the C method, J. Opt. Soc. Am. A 24, 1085-1096 (2007).

  36. L. Zeng and L. Li, Optical mosaic gratings made by consecutive, phase-interlocked, holographic exposures using diffraction from latent fringes, Opt. Lett., 32, 1081-1083 (2007).

  37. Y. Hu and L. Zeng, Grating mosaic based on image processing of far-field diffraction intensity patterns in two wavelengths, Appl. Opt., 46, 7018-7025 (2007).

  38. Y. Hu, L. Zeng, and L. Li, Method to mosaic gratings that relies on analysis of far-field intensity patterns in two wavelengths, Opt. Commun., 269, 285-290 (2007).

  39. L. Zeng and L. Li, Method of making mosaic gratings by using a two-color heterodyne interferometer containing a reference grating, Opt. Lett. 31, 152-155 (2006).

  40. B. Bai and L. Li, Group-theoretic approach to enhancing the Fourier modal method for crossed gratings with hexagonal symmetry, J. Mod. Opt., 53, 1459-1483 (2006).

  41. B. Bai and L. Li, Group-theoretic approach to enhancing the Fourier modal method for crossed gratings with square symmetry, J. Opt. Soc. Am. A 23, 572-580 (2006).

  42. B. Bai and L. Li, Group-theoretic approach to enhancing the Fourier modal method for crossed gratings with equilateral triangular symmetry, Opt. Commun. 262, 140-151 (2006).

  43. H. Lin, L. Li, and L. Zeng, In-situ end-point detection during ion-beam etching of multilayer dielectric gratings, Chin. Opt. Lett. 3,63 (2005).

  44. B. Bai, L. Li, and L. Zeng, Experimental verification of enhanced transmission through two-dimensionally corrugated metallic films without holes, Opt. Lett. 18, 2360-2362 (2005).

  45. G. Wu, Z. Cai, and L. Zeng, A two color heterodyne interferometer based on diffraction grating for displacement measurement, Key Engineering Materials, 295-296, 189-194 (2005).

  46. K. Wang and L. Zeng, Two-dimensional surface-profile imaging technique based on double-grating frequency shifter, Appl. Opt. 44, 4625-4630 (2005).

  47. L. Li and L. Zeng, Measurement of duty cycles of photoresist grating masks made on top of multilayer dielectric stacks, Appl. Opt. 44, 4494-4500 (2005).

  48. K. Wang and L. Zeng, Double-grating frequency shifter for low-coherence heterodyne interferometry, Opt. Commun. 251, 1-3 (2005).

  49. K. Wang and L. Zeng, Heterodyne Fourier transform spectroscopy based on double-grating frequency shifter, Rev. Sci. Instrum. 76, 063108 (2005).

  50. B. Bai and L. Li, Group-theoretic approach to the enhancement of the Fourier modal method for crossed gratings: C2 symmetry case, J. Opt. Soc. Am. A 22, 654-661 (2005).

  51. B. Bai and L. Li, Group-theoretic approach to enhancing the Fourier modal method for crossed gratings with one or two reflection symmetries, J. Opt. A: Pure Appl. Opt. 7, 271-278 (2005).

  52. B. Bai and L. Li, Group-theoretic approach to enhancing the Fourier modal method for crossed gratings of plane group p3, J. Mod. Opt. 52, 1619-1634 (2005).

  53. B. Bai, L. Li, and L. Zeng, Experimental verification of enhanced transmission through two-dimensionally corrugated metallic films without holes, Opt. Lett. 30, 2360-2362 (2005).

  54. B. Bai and L. Li, Group-theoretic approach to enhancing the Fourier modal method for crossed gratings with C4 symmetry, J. Opt. A: Pure Appl. Opt. 7, 783-789 (2005).

  55. 周倩,  李立峰, 光谱仪用平场凹面光栅的凸面母光栅的消像差设计思路, 光谱学与光谱分析, 29, 2281-2285 (2009).

  56. 孟祥峰, 李立峰, 提高离子束刻蚀亚微米光栅侧壁陡直度的方法, 光学学报, 28, 189–193 (2008).

  57. 周倩, 李立峰, 曾理江, 平场全息凹面光栅制作结构与使用结构之间误差补偿作用的数值模拟与实验验证, 光谱学与光谱分析, 28, 1674-1678 (2008).

  58. 林华, 李立峰, 曾理江, 利用导波耦合角度实时控制光刻胶光栅掩模的占宽比, 光学学报, 26, 767–772 (2006).

 

仿生测量方面论文:

  1. G. Wu, and L. Zeng, Measuring the kinematics of a free-flying hawk-moth (Macroglossum stellatarum) by a comb-fringe projection method. Acta Mechanica Sinica, 26, 67-71 (2010).

  2. G. Wu, Measuring the Three-Dimensional Kinematics of a Free-Swimming Koi Carp by Video Tracking Method. Journal of Bionic Engineering, 7, 49-55 (2010).

  3. Y. Yang, G. Wu, Y. Yu, and B. Tong, Flow physics of routine turns of koi carp (Cyprinus Carpio Koi), J. Biom. Sci. Eng., 4, 67-81 (2009).

  4. G. Wu, L. Zeng, and L. Ji, Measuring the wing kinematics of a moth (Helicoverpa Armigera) by a  two-dimensional fringe projection method, J. Bionic Eng., 5, 138-142 (2008).

  5. Y. Yang, G. Wu, Y. Yu, and B. Tong, Two-dimensional self-propelled fish motion in medium: An integrated method for deforming body dynamics and unsteady fluid dynamics, Chinese Phys. Lett., 25, 597-600 (2008).

  6. G. Wu, Y. Yang and L. Zeng, Routine turning maneuvers of koi carps (Cyprinus carpio koi): effects of turning rate on kinematics and hydrodynamics, J. Exp. Biol., 210, 4379-4389 (2007).

  7. G. Wu and L. Zeng, Video tracking method for three-dimensional measurement of a free- swimming fish, Sci. China Ser. G., 50, 779-786 (2007).

  8. G. Wu, Y. Yang, and L. Zeng, Kinematics, hydrodynamics and energetic advantages of burst-and-coast swimming of koi carps (Cyprinus carpio koi), J. Exp. Biol., 210, 2181-2191 (2007).

  9. G. Wu, Y. Yang, and L. Zeng, Novel method based on video tracking system for simultaneous measurement of kinematics and flow in the wake of a freely swimming fish, Rev. Sci. Instru., 77, 114302 (2006).

  10. Z. Cai and L. Zeng, A fast search coil sensing method for tracking system, Key Engineering Materials 295-296, 601-606 (2005).

  11. S. Zhang and L. Zeng, Design of a two degree of freedom beating machine, Key Engineering Materials, 295-296, 607-612 (2005).

  12. Y. Hu and L. Zeng, Multipoint focus-detecting method for measurement of biological nonsmooth surface topography, Rev. Sci. Instru. 76, 053101 (2005).

  13. 陶圣, 曾理江, 结合空间侧抑制的仿生复眼模型, 光学技术, 32, 337-340 (2007).

  14. 陶圣, 曾理江, 基于昆虫视觉原理的角速度测量系统, 清华大学学报, 47, 1308-1311 (2007).
     

其他光学测量方法方面论文:

  1. Zheng, Ruitong. Wu, Guanhao. The constant fraction discriminator in pulsed time-of-flight laser rangefinding. Proceedings
    of the SPIE, Volume 8332, pp. 833208-833208-4. 2011 (EI)

  2. K. Wang, Z. Cai, and L. Zeng, A two-dimensional surface-profile imaging technique based on heterodyne interferometer, Key Engineering Materials, 295-296, 477-482 (2005).

  3. 郑睿童, 吴冠豪. 基于线阵APD探测器的脉冲式一维非扫描激光雷达系统 ,  红外与激光工程, 2012,41(1): 96-100. (EI)

 

发明专利:

  1. 吴冠豪,曾理江,激光测绘系统,发明专利,专利号:200910118938.2 (2009).
  2. 周倩,李立峰,一种利用全息法在凸面基底上直接制作光刻胶母光栅的方法,专利号:200810102683.6 (2008).

  3. 曾理江,汪凯巍,一种宽带光源的无色差频移及外差干涉信号产生装置,专利号:03104769.6 (2005).

  4. 王世玮,曾理江,一种双光束曝光系统中光栅衍射波面误差的反馈调节方法,专利号:CN104570621B(2016).

  5. 马冬晗,曾理江,一种宽光束扫描曝光方法,专利号:CN104570620B(2016).

 

 

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